Moth-eye structured mold using sputtered glassy carbon layer for large-scale applications

Moth-eye structured mold using sputtered glassy carbon layer for large-scale applications

Blog Article

Surface reflection is a problem in applications such as solar panels, smartphones, and tablet computers.To prevent such reflection, we previously developed a moth-eye structure that can be fabricated with Bong Bowls a single film.This antireflection structure (ARS) suppresses reflection over a wide range of light wavelengths and incident angles.The production of large-area ARS films, which can be achieved using ultraviolet nanoimprint lithography (UV-NIL), is required for solar panels and displays.

In our previous study, a moth-eye structure was fabricated by irradiating a glassy carbon (GC) substrate with an oxygen ion beam.However, it is difficult to fabricate a large GC Rolling Papers substrate because GC is made using powder metallurgy.To overcome this problem, we used a sputtered GC layer as the ARS master mold material.In this study, we demonstrate that a moth-eye structure can be formed by irradiating sputtered GC with an oxygen ion beam using an inductively coupled plasma (ICP) system.

We formed a moth-eye structure on sputtered GC using two-step ICP etching.The fabricated moth-eye structured mold had a reflectance of approximately 0.1% in the visible-light region.In addition, a moth-eye film transferred using UV-NIL with the fabricated moth-eye structured mold had a low reflectance of approximately 0.

4% in the visible-light region.